Fabrication of nanoscale zero-mode waveguides using microlithography for single molecule sensing.

نویسندگان

  • Chu-Hsiang Teng
  • Troy A Lionberger
  • Jin Zhang
  • Edgar Meyhöfer
  • Pei-Cheng Ku
چکیده

We present a novel approach to the fabrication of zero-mode waveguides (ZMWs) using inexpensive processing techniques. Our method is capable of rapid fabrication of circular nanoapertures with diameters ranging from 70 nm to 2 μm, allowing us to perform a detailed characterization of the dependence of the fluorescence emission on the waveguide diameter. We also validated the use of the fabricated ZMWs by detecting single molecule binding events with a signal-to-noise ratio of ten.

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عنوان ژورنال:
  • Nanotechnology

دوره 23 45  شماره 

صفحات  -

تاریخ انتشار 2012